Equipment Functions: This equipment utilizes high-precision UV laser cold processing technology, specifically designed for efficient marking of semiconductor wafers.
Product Description
Equipment Functions: This equipment utilizes high-precision UV laser cold processing technology, specifically designed for efficient marking of semiconductor wafers. Equipped with an intelligent vision positioning and automated control system, it can permanently and precisely mark various wafers, including silicon, SiC, and GaN, with features such as QR codes, serial numbers, wafer IDs, and anti-counterfeiting markings. The markings are?highly clear, easily recognizable, and durable.
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The processing is free from mechanical stress, thermal damage, and contamination, ensuring wafer integrity and device performance, meeting the traceability requirements of automotive-grade, high-reliability chips. The equipment operates stably and is highly adaptable, seamlessly integrating with automated production lines to provideefficient, precise, and reliable marking solutions for semiconductor manufacturing.
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Wide Application Areas: Primarily used in the semiconductor wafer industry.
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Sample Images

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Equipment Parameters
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Product Name |
Laser wafer marking equipment |
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Processing Size |
6-12 inches |
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Accuracy |
Marking accuracy (mm) |
±0.1 mm (contour positioning), ±0.01 mm (mark positioning) |
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Laser |
Laser type |
UV?picosecond |
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Laser power (W) |
≥5 |
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Process Parameters |
Minimum processing character (mm) |
≥0.15 |
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Lens processing area?(mm) |
≥50 |
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Overall Processing Accuracy |
±0.02mm |
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Inspection Function |
Integrate OCR or 2D code reading for quality re-inspection |
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Loading & Unloading |
Fully automated robotic loading/unloading system (optional) |
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Communication |
Supports the SECS/GEM protocol and MES system integration |
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Outline Dimension |
1450*1850*2200 (length, width, height) |
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Weight |
Approximately 1.6 tons |
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E-mail: mkxn@szmicrotreat.com
Tel.: +86 512 8391 9217
Tel.: +86 173 1528 3532
Tel.: +86 188 6210 4169
WhatsApp: +8618015504961
Add.: Unit 101, Building 63, Suzhou Nano City, No. 99 Jinji Lake Avenue, Suzhou Industrial Park, Suzhou