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Glovebox ultrafast laser processing system

The system integrates a customized fully enclosed ultra-high-purity inert gas glovebox module, capable of intelligently controlling and maintaining a highly stable argon or nitrogen atmosphere.

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Product Description

Equipment Functions: Integrates?a customized fully enclosed ultra-high-purity inert gas glovebox module, capable of intelligently controlling and maintaining a highly stable argon or nitrogen atmosphere. By effectively isolating oxygen, moisture, and other reactive contaminants, the system minimizes oxidation, thermal damage, and material phase changes during high-energy laser processing.

Optimized for precision manufacturing, the system significantly improves microstructure quality and processing consistency, making it ideal for rare metals, high-purity materials, and advanced micro/nano-fabrication applications. It provides a reliable platform for high-precision laser processing under controlled atmospheric conditions.

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Wide Application Areas: Primarily used in semiconductors (MEMS devices, precision sensors), and micro/nano processing of new materials in universities and research institutes.

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Sample Images

Glovebox ultrafast laser processing system

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Equipment Parameters

Product Name

Glovebox ultrafast laser processing system

Processing Area

300*300mm, customizable

Positioning Accuracy

XY positioning accuracy

±0.003

XY repeatability?(mm)

±0.002

Z-axis positioning accuracy (mm)

±0.01

Z-axis repeatability (mm)

±0.005

Laser Scource

Laser type

picosecond/femtosecond

Laser power (W)

≥10

Process Parameters

Minimum processing line width (mm)

≤0.01

Lens processing field (mm)

≥50

Glovebox Specifications

Leakage?rate

<0.05 vol%/h

Working gas

Inert gases such as N?, Ar, and He

Moisture and oxygen content

<1 ppm

Maximum Platform Acceleration

1G

Overall Processing Accuracy

±0.01mm

Maximum Platform Speed

1000mm/s

Machine Dimension

1550*1550*2200 (length, width, height)

Weight

Approximately 2 tons

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Contact Us

Contact Us

E-mail: mkxn@szmicrotreat.com

Tel.: +86 512 8391 9217

Tel.: +86 173 1528 3532

Tel.: +86 188 6210 4169

WhatsApp: +8618015504961

Add.: Unit 101, Building 63, Suzhou Nano City, No. 99 Jinji Lake Avenue, Suzhou Industrial Park, Suzhou

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