The system integrates a customized fully enclosed ultra-high-purity inert gas glovebox module, capable of intelligently controlling and maintaining a highly stable argon or nitrogen atmosphere.
Product Description
Equipment Functions: Integrates?a customized fully enclosed ultra-high-purity inert gas glovebox module, capable of intelligently controlling and maintaining a highly stable argon or nitrogen atmosphere. By effectively isolating oxygen, moisture, and other reactive contaminants, the system minimizes oxidation, thermal damage, and material phase changes during high-energy laser processing.
Optimized for precision manufacturing, the system significantly improves microstructure quality and processing consistency, making it ideal for rare metals, high-purity materials, and advanced micro/nano-fabrication applications. It provides a reliable platform for high-precision laser processing under controlled atmospheric conditions.
?
Wide Application Areas: Primarily used in semiconductors (MEMS devices, precision sensors), and micro/nano processing of new materials in universities and research institutes.
?
Sample Images

?
Equipment Parameters
|
Product Name |
Glovebox ultrafast laser processing system |
|
|
Processing Area |
300*300mm, customizable |
|
|
Positioning Accuracy |
XY positioning accuracy |
±0.003 |
|
XY repeatability?(mm) |
±0.002 |
|
|
Z-axis positioning accuracy (mm) |
±0.01 |
|
|
Z-axis repeatability (mm) |
±0.005 |
|
|
Laser Scource |
Laser type |
picosecond/femtosecond |
|
Laser power (W) |
≥10 |
|
|
Process Parameters |
Minimum processing line width (mm) |
≤0.01 |
|
Lens processing field (mm) |
≥50 |
|
|
Glovebox Specifications |
Leakage?rate |
<0.05 vol%/h |
|
Working gas |
Inert gases such as N?, Ar, and He |
|
|
Moisture and oxygen content |
<1 ppm |
|
|
Maximum Platform Acceleration |
1G |
|
|
Overall Processing Accuracy |
±0.01mm |
|
|
Maximum Platform Speed |
1000mm/s |
|
|
Machine Dimension |
1550*1550*2200 (length, width, height) |
|
|
Weight |
Approximately 2 tons |
|
Related Products
Request a Quote
Request a Quote
Navigation
Navigation
Contact Us
Contact Us
E-mail: mkxn@szmicrotreat.com
Tel.: +86 512 8391 9217
Tel.: +86 173 1528 3532
Tel.: +86 188 6210 4169
WhatsApp: +8618015504961
Add.: Unit 101, Building 63, Suzhou Nano City, No. 99 Jinji Lake Avenue, Suzhou Industrial Park, Suzhou